High-Tech Facility Research Center, NTU at Zhubei

High-Tech Industry is the industry applying advanced science technology to the fields of microelectronics, optoelectronics, precision instruments, electronic communications, nanotechnology, pharmaceutical preparation, microbiological research, medical equipment, animal experiments, aerospace technology, and other related industries. To sum up, the science and technology required in the high-tech industry is high-tech. Herein, semiconductor is the grains of high tech industry. It not only possesses versatile substance that has both electrical conductivity and insulating properties, but also contains the transistor ability of digitization. Thus, semiconductor lays down the foundation of all the high-tech. Semiconductor continuously brings forth improved technology, knowledge, economy, and quality of human life. It is well known, to fabricate semiconductor and to advance semiconductor technology, facility is a part of and prerequisite to semiconductor Manufacturing & R&D. In a semiconductor manufacturing plant (fabrication fab) high performance tools, extremely precise instruments, and ultrapure utilities such as air, water, electricity and chemicals are needed for semiconductor manufacturing & R&D, Moreover, these tools/instruments/utilities must be operated in stringently controlled cleanrooms, on stable platforms, and/or performed under an ambience with electromagnetic compatibility. To continuously ensure the economic development advantages of high-tech semiconductor industries at Taiwan, and to upgrade civil engineering, the High-Tech Facility Research Center was established by Department of Civil Engineering, National Taiwan University in fall 2006. The mission of the Center is to enhance high-tech facility R&D, to foster talents and to provide industrial service. At the beginning, the Center focused on contamination control, electromagnetic mitigation, vibration elimination, construction and acceptance tests, and 3D facility information modeling and 4D (3D + Time) scheduling integration. Current target issues include energy savings, carbon dioxide reduction, circulate economy of fab wastes, eco-environmental protection, smart manufacturing, big data, cloud computing, artificial intelligence(AI) for improving productivity, assuring the quality, safety, security and health of the facility, and enhancing the effective performance of environmental, social and governance (ESG) .